Enhanced Work Function of Al-Doped Zinc-Oxide Thin Films by Oxygen Inductively Coupled Plasma Treatment

LI Zebin(李泽斌); WU Zhonghang(吴忠航); JU Jiaqi(居家奇); HE Kongduo(何孔多); CHEN Zhenliu(陈枕流); YANG Xilu(杨曦露); YAN Hang(颜航); OU Qiongrong(区琼荣); LIANG Rongqing(梁荣庆)

doi:10.1088/1009-0630/16/1/17

Plasma Science and Technology > 2014 > 16(1): 79-82. > DOI: 10.1088/1009-0630/16/1/17

LI Zebin(李泽斌), WU Zhonghang(吴忠航), JU Jiaqi(居家奇), HE Kongduo(何孔多), CHEN Zhenliu(陈枕流), YANG Xilu(杨曦露), YAN Hang(颜航), OU Qiongrong(区琼荣), LIANG Rongqing(梁荣庆). Enhanced Work Function of Al-Doped Zinc-Oxide Thin Films by Oxygen Inductively Coupled Plasma Treatment[J]. Plasma Science and Technology, 2014, 16(1): 79-82. DOI: 10.1088/1009-0630/16/1/17

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Enhanced Work Function of Al-Doped Zinc-Oxide Thin Films by Oxygen Inductively Coupled Plasma Treatment

1 Department of Light Sources and Illuminating Engineering, Fudan University, Shanghai 200433, China 2 Engineering Research Center of Advanced Lighting Technology, Ministry of Education, Shanghai 200433, China

Funds: supported by National Natural Science Foundation of China (Nos.11005021, 51177017 and 11175049), the Fudan University Excellent Doctoral Research Program (985 Project) and the Ph.D Programs Foundation of Ministry of Education of China (No.20120071110031)

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Received Date: August 29, 2013

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Abstract

Abstract

Al-doped zinc-oxide (AZO) thin films treated by oxygen and chlorine inductively coupled plasma (ICP) were compared. Kelvin probe (KP) and X-ray photoelectron spectroscopy (XPS) were employed to characterize the effect of treatment. The results of KP measurement show that the surface work function of AZO thin films can increase up to 5.92 eV after oxygen ICP (O-ICP)’s treatment, which means that the work function was increased by at least 1.1 eV. However, after the treatment of chlorine ICP (Cl-ICP), the work function increased to 5.44 eV, and the increment was 0.6 eV. And 10 days later, the work function increment was still 0.4 eV after O-ICP’s treatment, while the work function after Cl-ICP’s treatment came back to the original value only after 48 hours. The XPS results suggested that the O-ICP treatment was more effective than Cl-ICP for enhancing the work function of AZO films, which is well consistent with KP results.
- oxygen inductively coupled plasma,
- Al-doped zinc-oxide (AZO),
- work function

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References (22)

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