Citation: | YOU Zuowei(尤左伟), DAI Zhongling(戴忠玲), WANG Younian(王友年). Simulation of Capacitively Coupled Dual-Frequency N 2, O 2, N 2 /O 2 Discharges: Effects of External Parameters on Plasma Characteristics[J]. Plasma Science and Technology, 2014, 16(4): 335-343. DOI: 10.1088/1009-0630/16/4/07 |
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