Comparison of heating mechanisms of argon helicon plasma in different wave modes with and without blue core

Ruilin CUI; Tianliang ZHANG; Qian YUAN; Feng HE; Ruoyu HAN; Jiting OUYANG

doi:10.1088/2058-6272/ac8510

Plasma Science and Technology > 2023 > 25(1): 015403. > DOI: 10.1088/2058-6272/ac8510

Ruilin CUI, Tianliang ZHANG, Qian YUAN, Feng HE, Ruoyu HAN, Jiting OUYANG. Comparison of heating mechanisms of argon helicon plasma in different wave modes with and without blue core[J]. Plasma Science and Technology, 2023, 25(1): 015403. DOI: 10.1088/2058-6272/ac8510

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Comparison of heating mechanisms of argon helicon plasma in different wave modes with and without blue core

School of Physics, Beijing Institute of Technology, Beijing 100081, People's Republic of China

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Corresponding author:
Jiting OUYANG, E-mail: jtouyang@bit.edu.cn
Received Date: May 19, 2022
Revised Date: July 25, 2022
Accepted Date: July 27, 2022
Available Online: December 05, 2023
Published Date: November 10, 2022

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Abstract

Abstract

In this work, we investigated the discharge characteristics and heating mechanisms of argon helicon plasma in different wave coupled modes with and without blue core. Spatially resolved spectroscopy and emission intensity of argon atom and ion lines were measured via local optical emission spectroscopy, and electron density was measured experimentally by an RF-compensated Langmuir probe. The relation between the emission intensity and the electron density was obtained and the wavenumbers of helicon and 'Trivelpiece-Gould' (TG) waves were calculated by solving the dispersion relation in wave modes. The results show that at least two distinct wave coupled modes appear in argon helicon plasma at increasing RF power, i.e. blue core (or BC) mode with a significant bright core of blue lights and a normal wave (NW) mode without blue core. The emission intensity of atom line 750.5 nm (I_ArI750.5nm) is related to the electron density and tends to be saturated in wave coupled modes due to the neutral depletion, while the intensity of ion line 480.6 nm (I_ArII480.6nm) is a function of the electron density and temperature, and increases dramatically as the RF power is increased. Theoretical analysis shows that TG waves are strongly damped at the plasma edge in NW and/or BC modes, while helicon waves are the dominant mechanism of power deposition or central heating of electrons in both modes. The formation of BC column mainly depends on the enhanced central electron heating by helicon waves rather than TG waves since the excitation of TG waves would be suppressed in this special anti-resonance region.
- argon helicon plasma,
- wave coupled mode,
- optical emission spectroscopy,
- helicon waves,
- TG waves

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Acknowledgments

This work was supported in part by National Natural Science Foundation of China (No. 11975047).

References (68)

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Comparison of heating mechanisms of argon helicon plasma in different wave modes with and without blue core

Abstract