Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma

We analyzed perpendicularly configured dual-frequency (DF) capacitively coupled plasmas (CCP). In this configuration, two pairs of electrodes are arranged oppositely, and the discharging is perpendicularly driven by two radio frequency (RF) sources. Particle-in-cell/Monte Carlo (PIC/MC) simulation showed that the con?guration had some advantages as this configu?ration eliminated some dual frequency coupling effects. Some variation and potential application of the discharging con?guration is discussed briefly.