Effects of HF frequency on plasma characteristics in dual-frequency helium discharge at atmospheric pressure by fluid modeling

Yinan WANG (王一男); Shuaixing LI (李帅星); Li WANG (王莉); Ying JIN (金莹); Yanhua ZHANG (张艳华); Yue LIU (刘悦)

doi:10.1088/2058-6272/aac71e

Plasma Science and Technology > 2018 > 20(11): 115402. > DOI: 10.1088/2058-6272/aac71e

Yinan WANG (王一男), Shuaixing LI (李帅星), Li WANG (王莉), Ying JIN (金莹), Yanhua ZHANG (张艳华), Yue LIU (刘悦). Effects of HF frequency on plasma characteristics in dual-frequency helium discharge at atmospheric pressure by fluid modeling[J]. Plasma Science and Technology, 2018, 20(11): 115402. DOI: 10.1088/2058-6272/aac71e

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Effects of HF frequency on plasma characteristics in dual-frequency helium discharge at atmospheric pressure by fluid modeling

¹ College of Science, Liaoning Shihua University, Fushun 113001, People’s Republic of China
² Key Laboratory of Materials Modification by Laser, Ion and Electron Beams (Ministry of Education), Dalian University of Technology, Dalian 116024, People’s Republic of China

Funds: This work was financially supported by National Natural Science Foundation of China (Grant No. 11505089) and the Doctoral Scientific Research Foundation of Liaoning Pro- vince (Grant No. 20170520381).

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Received Date: March 08, 2018

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Abstract

Abstract

On the basis of the fluid theory and the drift–diffusion approximation, a numerical model for dual-frequency atmospheric pressure helium discharge is established, in order to investigate the effects of the high frequency source (HF) on the characteristics of dual-frequency atmospheric pressure helium discharge. The numerical results showed that the electron heating rate increases with enhancing HF frequency, as well as the particles densities, electron dissipation rate, current density, net electron generation and bulk plasma region. Moreover, it is also observed that the efficient electron heating region moves when the HF frequency has been changed. The plasma parameters are not linear change with the HF frequency linearly increasing.
- dual-frequency,
- numerical study,
- electron energy mechanisms

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Effects of HF frequency on plasma characteristics in dual-frequency helium discharge at atmospheric pressure by fluid modeling