Effects of HF frequency on plasma characteristics in dual-frequency helium discharge at atmospheric pressure by fluid modeling

On the basis of the fluid theory and the drift–diffusion approximation, a numerical model for dual-frequency atmospheric pressure helium discharge is established, in order to investigate the effects of the high frequency source (HF) on the characteristics of dual-frequency atmospheric pressure helium discharge. The numerical results showed that the electron heating rate increases with enhancing HF frequency, as well as the particles densities, electron dissipation rate, current density, net electron generation and bulk plasma region. Moreover, it is also observed that the efficient electron heating region moves when the HF frequency has been changed. The plasma parameters are not linear change with the HF frequency linearly increasing.