Silicone-coated polyimide films deposited by surface dielectric barrier discharges

Junggil KIM; Yunjung KIM; Sangjin KIM; Guangsup CHO

doi:10.1088/2058-6272/aae477

Plasma Science and Technology > 2019 > 21(1): 15506-015506. > DOI: 10.1088/2058-6272/aae477

Junggil KIM, Yunjung KIM, Sangjin KIM, Guangsup CHO. Silicone-coated polyimide films deposited by surface dielectric barrier discharges[J]. Plasma Science and Technology, 2019, 21(1): 15506-015506. DOI: 10.1088/2058-6272/aae477

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Silicone-coated polyimide films deposited by surface dielectric barrier discharges

Department of Electrical and Biological Physics, Kwangwoon University, 20 Kwangwoon-ro, Nowon-gu, Seoul 01897, Republic of Korea

Funds: This work was supported in part by the Korean Institute of Energy Technology Evaluation and Planning (KETEP) and the Ministry of Trade, Industry & Energy (MOTIE) of the Republic of Korea (No. 20173030014460), and partly by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (NRF-2018R1A2B6008642).

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Received Date: April 23, 2018

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Abstract

Abstract

Hybrid dielectric barrier discharges are investigated for plasma generated on the surface of a dielectric layer, where two conducting electrodes of high voltage and ground are formulated on the upper and bottom surfaces. Using a flexible thin polyimide-film of a thickness ranging from 25 to 125 μm, a plasma is generated with a voltage of about 1 kV and a frequency of 40 kHz. However, the surface of the dielectric layer was etched through a chemical reaction involving plasma oxygen radical species, and thus the polyimide films failed readily, resulting in dielectric breakdown within short operating time ranging from a few minutes to several tens of minutes, based on the film thicknesses of 25 μm and 125 μm, respectively. These plasma erosions were prevented by coating the polyimide surface with a 25 μm thick silicone paste. The silicone- coated film surface was then reinforced remarkably against plasma erosion as the organic polymer was vulnerable to chemical reaction of the plasma species, while the inorganic silicone exhibited a high chemical resistance against plasma erosion.
- plasma,
- discharge,
- atmospheric pressure nonthermal plasma,
- polyimide film,
- plasma erosion

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References

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Silicone-coated polyimide films deposited by surface dielectric barrier discharges