Improvement of plasma uniformity and mechanical properties of Cr films deposited on the inner surface of a tube by an auxiliary anode near the tube tail

Houpu WU; Xiubo TIAN; Linlin ZHENG; Chunzhi GONG; Peng LUO

doi:10.1088/2058-6272/ac57fd

Plasma Science and Technology > 2022 > 24(5): 054008. > DOI: 10.1088/2058-6272/ac57fd

Houpu WU, Xiubo TIAN, Linlin ZHENG, Chunzhi GONG, Peng LUO. Improvement of plasma uniformity and mechanical properties of Cr films deposited on the inner surface of a tube by an auxiliary anode near the tube tail[J]. Plasma Science and Technology, 2022, 24(5): 054008. DOI: 10.1088/2058-6272/ac57fd

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Improvement of plasma uniformity and mechanical properties of Cr films deposited on the inner surface of a tube by an auxiliary anode near the tube tail

State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin150001, People's Republic of China

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Corresponding author:
Xiubo TIAN, E-mail: xiubotian@163.com
Received Date: September 06, 2021
Revised Date: February 20, 2022
Accepted Date: February 22, 2022
Available Online: December 11, 2023
Published Date: May 16, 2022

Graphical Abstract

Abstract

Abstract

In order to improve the length of plasma in a whole tube and mechanical properties of Cr films deposited on the inner surface of the tube, a high-power impulse magnetron sputtering coating method with a planar cathode target and auxiliary anode was proposed. The auxiliary anode was placed near the tube tail to attract plasma into the inner part of the tube. Cr films were deposited on the inner wall of a 20# carbon steel tube with a diameter of 40 mm and length of 120 mm. The influence of auxiliary anode voltage on the discharge characteristics of the Cr target, and the structure and mechanical properties of Cr films deposited on the inner surface of the tube were explored. With higher auxiliary anode voltage, an increase in substrate current was observed, especially in the tube tail. The thickness uniformity, compactness, hardness and H/E ratios of the Cr films deposited on the inner surface of the tube increased with the increase in auxiliary anode voltage. The Cr films deposited with auxiliary anode voltage of 60 V exhibited the highest hardness of 9.6 GPa and the lowest friction coefficient of 0.68.
- high-power impulse magnetron sputtering,
- auxiliary anode,
- inner surface,
- Cr films

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Acknowledgments

The authors gratefully acknowledge the financial support from National Natural Science Foundation of China (Nos. 12075071 and 11875119) and Heilongjiang Touyan Innovation Team Program (HITTY-20190013).

References (38)

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