Study of the Discharge Mode in Micro-Hollow Cathode

HE Feng (何锋); HE Shoujie (何寿杰); ZHAO Xiaofei (赵晓菲); GUO Bingang (郭滨刚); OUYANG Jiting (欧阳吉庭)

doi:10.1088/1009-0630/14/12/08

Plasma Science and Technology > 2012 > 14(12): 1079-1083. > DOI: 10.1088/1009-0630/14/12/08

HE Feng (何锋), HE Shoujie (何寿杰), ZHAO Xiaofei (赵晓菲), GUO Bingang (郭滨刚), OUYANG Jiting (欧阳吉庭). Study of the Discharge Mode in Micro-Hollow Cathode[J]. Plasma Science and Technology, 2012, 14(12): 1079-1083. DOI: 10.1088/1009-0630/14/12/08

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Study of the Discharge Mode in Micro-Hollow Cathode

1 School of Physics, Beijing Institute of Technology, Beijing 100081, China 2 College of Physics Science and Technology, Hebei University, Baoding 071002, China 3 Lions Mansion Akashi Okubo 508, Okubo-machi 306, Okubo-cho, Akashi, Hyogo 674-0067, Japan

Funds: supported by National Natural Science Foundation of China (No. 11005009)

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Received Date: September 25, 2011

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Abstract

Abstract

In this study, micro-hollow cathode discharge (MHCD) is investigated by a °uid model with drift-di®usion approximation. The MHC device is a cathode/dielectric/anode sand- wich structure with one hole of a diameter D=200 ¹m. The gas is a Ne/Xe mixture at a pressure p=50»500 Torr. The evolutions of the discharge show that there are two di®erent discharge modes. At larger pD the discharge plasma and high density excited species expand along the cathode surface and, a ringed discharge mode is formed. At smaller pD, the discharge plasma and the excited species expand along the axis of the cathode aperture to form a columnar discharge.
- MHCD,
- discharge mode,
- fluid model,
- drift-di®usion approximation

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