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HE Feng (何锋), HE Shoujie (何寿杰), ZHAO Xiaofei (赵晓菲), GUO Bingang (郭滨刚), OUYANG Jiting (欧阳吉庭). Study of the Discharge Mode in Micro-Hollow Cathode[J]. Plasma Science and Technology, 2012, 14(12): 1079-1083. DOI: 10.1088/1009-0630/14/12/08
Citation: HE Feng (何锋), HE Shoujie (何寿杰), ZHAO Xiaofei (赵晓菲), GUO Bingang (郭滨刚), OUYANG Jiting (欧阳吉庭). Study of the Discharge Mode in Micro-Hollow Cathode[J]. Plasma Science and Technology, 2012, 14(12): 1079-1083. DOI: 10.1088/1009-0630/14/12/08

Study of the Discharge Mode in Micro-Hollow Cathode

Funds: supported by National Natural Science Foundation of China (No. 11005009)
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  • Received Date: September 25, 2011
  • In this study, micro-hollow cathode discharge (MHCD) is investigated by a °uid model with drift-di®usion approximation. The MHC device is a cathode/dielectric/anode sand- wich structure with one hole of a diameter D=200 ¹m. The gas is a Ne/Xe mixture at a pressure p=50»500 Torr. The evolutions of the discharge show that there are two di®erent discharge modes. At larger pD the discharge plasma and high density excited species expand along the cathode surface and, a ringed discharge mode is formed. At smaller pD, the discharge plasma and the excited species expand along the axis of the cathode aperture to form a columnar discharge.

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