Gas Breakdown of Radio Frequency Glow Discharges in Helium at near Atmospheric Pressure

LIU Xinkun (刘新坤); XU Jinzhou (徐金洲); CUI Tongfei (崔桐菲); GUO Ying (郭颖); et al.

doi:10.1088/1009-0630/15/7/04

Plasma Science and Technology > 2013 > 15(7): 623-626. > DOI: 10.1088/1009-0630/15/7/04

LIU Xinkun (刘新坤), XU Jinzhou (徐金洲), CUI Tongfei (崔桐菲), GUO Ying (郭颖), et al.. Gas Breakdown of Radio Frequency Glow Discharges in Helium at near Atmospheric Pressure[J]. Plasma Science and Technology, 2013, 15(7): 623-626. DOI: 10.1088/1009-0630/15/7/04

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Gas Breakdown of Radio Frequency Glow Discharges in Helium at near Atmospheric Pressure

School of Science, Donghua University, Shanghai 201602, China 2 Magnetic Confinement Fusion Research Center, Ministry of Education of the People’s Republic of China, Shanghai 201602, China

Funds: supported by National Natural Science Foundation of China (Nos.10835004, 10905010), Shanghai Shuguang Program (No.08SG31) and the Fundamental Research Funds for the Central Universities of China

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Received Date: April 15, 2012

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Abstract

Abstract

A one-dimensional self-consistent fluid model was developed for radio frequency glow discharge in helium at near atmospheric pressure, and was employed to study the gas breakdown characteristics in terms of breakdown voltage. The effective secondary electron emission coefficient and the effective electric field for ions were demonstrated to be important for determining the breakdown voltage of radio frequency glow discharge at near atmospheric pressure. The constant of A was estimated to be 64±4 cm ⁻¹ Torr⁻¹, which was proportional to the first Townsend coefficient and could be employed to evaluate the gas breakdown voltage. The reduction in the breakdown voltage of radio frequency glow discharge with excitation frequency was studied and attributed to the electron trapping effect in the discharge gap.
- radio frequency glow discharge,
- gas breakdown,
- numerical simulation

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