The Effect of the Earthed Electrode Size on the Ignition Voltage of Low-Pressure RF Capacitive Discharge in Argon

A. A. AZOOZ; M. A. AHMAD

doi:10.1088/1009-0630/15/9/09

Plasma Science and Technology > 2013 > 15(9): 881-884. > DOI: 10.1088/1009-0630/15/9/09

A. A. AZOOZ, M. A. AHMAD. The Effect of the Earthed Electrode Size on the Ignition Voltage of Low-Pressure RF Capacitive Discharge in Argon[J]. Plasma Science and Technology, 2013, 15(9): 881-884. DOI: 10.1088/1009-0630/15/9/09

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The Effect of the Earthed Electrode Size on the Ignition Voltage of Low-Pressure RF Capacitive Discharge in Argon

1 Department of Physics, College of Science, Mosul University, Mosul 41002, Iraq 2 Department of Physics, College of Education, Mosul University, Mosul 41002, Iraq

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Received Date: May 27, 2012

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Abstract

Abstract

The effect of the grounded electrode diameter on the ignition voltage using 13.56 MHz in argon gas is studied experimentally. The results indicate a systematic decrease of the breakdown voltage with increasing electrode area for the same pd value. No multi-valued breakdown voltages are observed. The Paschen minimum is not affected by the electrode diameter as long as the parallel plane approximation is valid. A modified Paschen equation which takes into account indirect discharge via the chamber walls at high pd values gives reasonable fits to the experimental data.
- CCRF,
- electrode size,
- Paschen law,
- RF plasma

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