Dependence of Decamethylcyclopentasiloxane (DMCPS) Dissociation on Ionized Energy by Using Quadrupole Mass Spectrum

ZHANG Haiyan; YE Chao; NING Zhaoyuan

Plasma Science and Technology > 2010 > 12(6): 677-680.

ZHANG Haiyan, YE Chao, NING Zhaoyuan. Dependence of Decamethylcyclopentasiloxane (DMCPS) Dissociation on Ionized Energy by Using Quadrupole Mass Spectrum[J]. Plasma Science and Technology, 2010, 12(6): 677-680.

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Dependence of Decamethylcyclopentasiloxane (DMCPS) Dissociation on Ionized Energy by Using Quadrupole Mass Spectrum

1.
School of Tongda, Nanjing University of Posts and Telecommunications, Nanjing 210003, China
2.
School of Physics Science and Technology, Key Laboratory of Thin Films in Jiangsu Province, Soochow University, Suzhou 215006, China

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Abstract

Abstract

Dependence of decamethylcyclopentasiloxane (DMCPS) organosilicon dissociation on ionized energy in the energy range of 25 to 70 eV is investigated by using a quadrupole mass spectrometry. At the ionized energy below 55 eV, the dissociation of DMCPS is dominant. As the ionized energy is above 55 eV, the DMCPS dissociation achieves the maximum cross section, while the fragments from the DMCPS dissociation can further dissociate, which leads to a different ingredient of fragments. At the lower ionized energy of 25 eV, the main fragments are SiOC2H5+, SiCH+, Si+, O2+ and CH3+ ions, which shows an important effect on the SiCOH low-k film deposition.
- quadrupole mass spectrum,
- dissociation,
- ionized energy,
- DMCPS organosilicon

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