Plasma-Chemical Synthesis of Oxide Powders Using Transformer-Coupled Discharge

I. M. ULANOV; M. V. ISUPOV; A. Yu LITVINSEV; P. A. MISCHENKO

doi:10.1088/1009-0630/15/4/14

Plasma Science and Technology > 2013 > 15(4): 386-390. > DOI: 10.1088/1009-0630/15/4/14

I. M. ULANOV, M. V. ISUPOV, A. Yu LITVINSEV, P. A. MISCHENKO. Plasma-Chemical Synthesis of Oxide Powders Using Transformer-Coupled Discharge[J]. Plasma Science and Technology, 2013, 15(4): 386-390. DOI: 10.1088/1009-0630/15/4/14

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Plasma-Chemical Synthesis of Oxide Powders Using Transformer-Coupled Discharge

Kutateladze Institute of Thermophysics SB RAS, Lavrentiev av.1, Novosibirsk 630090, Russia

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Received Date: May 19, 2011

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Abstract

Abstract

An experimental investigation of transformer-coupled discharge in an Ar-O2 mixture with the addition of SiCl4, TiCl₄ and ZrCl₄ has been carried out under the atmospheric pressure of plasma-forming gases. Discharge power and discharge heat losses have been determined, and the dispersion and phase composition of reaction products (oxide powders) has been analyzed with SEM and X-ray di®raction analysis. Investigations reveal the formation of ultrafine oxide powders in the case of vaporized chloride (SiCl₄ and TiCl₄) injecting into the transformer coupled discharge. In the case of fine powder (ZrCl4) injection, full oxidation was not observed and reaction products consisted of a mixture of ZrO₂ and ZrOCl₂. A conclusion has been made regarding the perspectives of using transformer-coupled discharge to produce ultrafine oxide powders.
- inductively coupled plasma,
- powders, silicon dioxide,
- zirconium dioxide,
- tita- nium dioxide

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