Plasma-Chemical Synthesis of Oxide Powders Using Transformer-Coupled Discharge

An experimental investigation of transformer-coupled discharge in an Ar-O2 mixture with the addition of SiCl4, TiCl₄ and ZrCl₄ has been carried out under the atmospheric pressure of plasma-forming gases. Discharge power and discharge heat losses have been determined, and the dispersion and phase composition of reaction products (oxide powders) has been analyzed with SEM and X-ray di®raction analysis. Investigations reveal the formation of ultrafine oxide powders in the case of vaporized chloride (SiCl₄ and TiCl₄) injecting into the transformer coupled discharge. In the case of fine powder (ZrCl4) injection, full oxidation was not observed and reaction products consisted of a mixture of ZrO₂ and ZrOCl₂. A conclusion has been made regarding the perspectives of using transformer-coupled discharge to produce ultrafine oxide powders.