The Effect of the Earthed Electrode Size on the Ignition Voltage of Low-Pressure RF Capacitive Discharge in Argon

The effect of the grounded electrode diameter on the ignition voltage using 13.56 MHz in argon gas is studied experimentally. The results indicate a systematic decrease of the breakdown voltage with increasing electrode area for the same pd value. No multi-valued breakdown voltages are observed. The Paschen minimum is not affected by the electrode diameter as long as the parallel plane approximation is valid. A modified Paschen equation which takes into account indirect discharge via the chamber walls at high pd values gives reasonable fits to the experimental data.