Gas pressure effect on plasma transport in a magnetic-filtered radio-frequency plasma source

N OUDINI; M M ALIM; R TADJINE; A BENDIB

doi:10.1088/2058-6272/ab7a41

Plasma Science and Technology > 2020 > 22(6): 65402-065402. > DOI: 10.1088/2058-6272/ab7a41

N OUDINI, M M ALIM, R TADJINE, A BENDIB. Gas pressure effect on plasma transport in a magnetic-filtered radio-frequency plasma source[J]. Plasma Science and Technology, 2020, 22(6): 65402-065402. DOI: 10.1088/2058-6272/ab7a41

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Gas pressure effect on plasma transport in a magnetic-filtered radio-frequency plasma source

¹ Laboratoire des Plasmas de Décharges, Centre de Développement des Technologies Avancées, Cité du 20 Aout BP 17 Baba Hassen, 16081 Algiers, Algeria
² Laboratoire d’Electronique Quantique, Faculté de Physique, USTHB, El Alia BP 32, Bab Ezzouar 16111, Algiers, Algeria

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Received Date: December 28, 2019
Revised Date: February 19, 2020
Accepted Date: February 25, 2020

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Abstract

Abstract

Volume negative ion production relies on a magnetic filter (MF), where the plasma downstream of the MF is characterized by a strip-like pattern that consists of a bright and dense plasma region. In this work, we study, in a radio-frequency plasma source, the effects of operating pressure on this strip. This investigation, conducted using a Langmuir probe, shows that the plasma uniformity might be controlled through the gas pressure. Moreover, the operating pressure determines on which hemi-cylinder (side of magnetic field lines) the strip forms. This side inversion of the high-density plasma hemi-cylinder is due to an inversion of an ambipolar electric field that changes the E × B drift direction.
- magnetic filter,
- radio-frequency plasma source,
- Langmuir probe,
- E × B drift,
- ambipolar electric field

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References

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Gas pressure effect on plasma transport in a magnetic-filtered radio-frequency plasma source