Simulation study on electron heating characteristics in magnetic enhancement capacitively coupled plasmas with a longitudinal magnetic field

Haiyun TAN; Tianyuan HUANG; Peiyu JI; Lanjian ZHUGE; Xuemei WU

doi:10.1088/2058-6272/ac7385

Plasma Science and Technology > 2022 > 24(10): 105403. > DOI: 10.1088/2058-6272/ac7385

Haiyun TAN, Tianyuan HUANG, Peiyu JI, Lanjian ZHUGE, Xuemei WU. Simulation study on electron heating characteristics in magnetic enhancement capacitively coupled plasmas with a longitudinal magnetic field[J]. Plasma Science and Technology, 2022, 24(10): 105403. DOI: 10.1088/2058-6272/ac7385

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Simulation study on electron heating characteristics in magnetic enhancement capacitively coupled plasmas with a longitudinal magnetic field

1.
School of Physical Science and Technology & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215006, People's Republic of China
2.
Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province & Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University, Suzhou 215006, People's Republic of China
3.
School of Optoelectronic Science and Engineering, Soochow University, Suzhou 215006, People's Republic of China
4.
Analysis and Testing Center, Soochow University, Suzhou 215123, People's Republic of China

More Information

Corresponding author:
Xuemei WU, E-mail: xmwu@suda.edu.cn
Received Date: March 15, 2022
Revised Date: May 23, 2022
Accepted Date: May 24, 2022
Available Online: December 07, 2023
Published Date: July 26, 2022

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Abstract

Abstract

The electron heating characteristics of magnetic enhancement capacitively coupled argon plasmas in presence of both longitudinal and transverse uniform magnetic field have been explored through both theoretical and numerical calculations. It is found that the longitudinal magnetic field can affect the heating by changing the level of the pressure heating along the longitudinal direction and that of the Ohmic heating along the direction which is perpendicular to both driving electric field and the applied transverse magnetic field, and a continuously increased longitudinal magnetic field can induce pressure heating to become dominant. Moreover, the electron temperature as well as proportion of some low energy electrons will increase if a small longitudinal magnetic field is introduced, which is attributed to the increased average electron energy. We believe that the research will provide guidance for optimizing the magnetic field configuration of some discharge systems having both transverse and longitudinal magnetic field.
- capacitively coupled plasma,
- longitudinal magnetic field,
- electron heating,
- PIC/MCC simulation

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Acknowledgments

This work is supported by National Natural Science Foundation of China (Nos. 11975163 and 12175160), a Project Funded by the Priority Academic Program Development of Jiangsu Higher Education Institutions (PAPD).

References (34)

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Simulation study on electron heating characteristics in magnetic enhancement capacitively coupled plasmas with a longitudinal magnetic field

Abstract