Citation: | ZHANG Lianzhu(张连珠), YAO Fubao(姚福宝), ZHAO Guoming(赵国明), HAO Yingying(郝莹莹), SUN Qian(孙倩). Effect of Addition of Nitrogen to a Capacitively Radio-Frequency Hydrogen Discharge[J]. Plasma Science and Technology, 2014, 16(3): 203-210. DOI: 10.1088/1009-0630/16/3/06 |
1 Dorner Reisel A, Kubler L, Irmer G, et al. 2005, Dia-mond Related Materials, 14: 1073;
|
2 Chen S T, Chen G S, Yang T J, et al. 2003, Elec-trochem. Solid-State Lett., 6: F4;
|
3 Nagai H, Hiramatsu M, Hori M, et al. 2003, Jpn. J.Appl. Phys., 42: L212;
|
4 van Helden J H,Wagemans W, Yagci G. 2007, J. Appl.Phys., 101: 043305;
|
5 Hirohata Y, Tsuchiya N, Hino T. 2001, Appl. Surf.Sci., 169: 612;
|
6 Tatarova E, Dias F M, Gordiets B, et al. 2005, Plasma Sources Sci. Technol., 14: 19;
|
7 Gordiets B, Ferrira C M, Pinheiro M J, et al. 1998,Plasma Sources Sci. Technol., 7: 363;
|
8 Gordiets B, Ferrira C M, Pinheiro M J, et al. 1998,Plasma Sources Sci. Technol., 7: 379;
|
9 Zhang L Z, Gao S X. 2006, Acta. Phys. Sin., 55: 3524 (in Chinese) Plasma Science and Technology, Vol.16, No.3, Mar. 2014;
|
10 Nunomura S, Kondo M. 2007, J. Appl. Phys., 102:093306;
|
11 Zhao S X, Zhang L Z. 2009, Nuclear Fusion and Plasma Physics, 29: 39 (in Chinese) ;
|
12 Nanbu K. 2000, IEEE Transactions on Plasma Sci.,28: 917;
|
13 Michael A Lieberman, Allan J Lichtenberg. 2006, Prin-ciples of Plasma Discharges and Materials Processing.Science Press, Beijing, p.46 (in Chinese) ;
|
14 Itikawa Y, Hayshi M, Ichimura A. 1986, J. Phys.Chem. Ref. Data, 15: 985;
|
15 Itikawa Y. 2006, J. Phys. Chem. Ref. Data, 35: 53;
|
16 Bogaerts A, Gijbels R. 2002, Spectrochimica Acta B,57: 1071;
|
17 Itikawa Y, Yoon J S, Song M Y, et al. 2008, J. Phys.Chem. Ref. Data, 37: 913;
|
18 Phelps A V. 1991, J. Phys. Chem. Ref. Data, 20: 557;
|
19 Tosi P, Dmitrijev O, Bassi D. 1992, J. Chem. Phys.,97: 3333;
|
20 Phelps A V. 1990, J. Phys. Chem. Ref. Data, 19: 653;
|
21 Phelps A V. 2009, Phys. Rev. E, 79: 066401;
|
22 Simko T, Martisovits V. 1997, Phys. Rev. E, 56: 5908
|
[1] | Xiang HE (何湘), Chong LIU (刘冲), Yachun ZHANG (张亚春), Jianping CHEN (陈建平), Yudong CHEN (陈玉东), Xiaojun ZENG (曾小军), Bingyan CHEN (陈秉岩), Jiaxin PANG (庞佳鑫), Yibing WANG (王一兵). Diagnostic of capacitively coupled radio frequency plasma from electrical discharge characteristics: comparison with optical emission spectroscopy and fluid model simulation[J]. Plasma Science and Technology, 2018, 20(2): 24005-024005. DOI: 10.1088/2058-6272/aa9a31 |
[2] | WANG Hongyu (王虹宇), JIANG Wei (姜巍), SUN Peng (孙鹏), ZHAO Shuangyun (赵双云), LI Yang (李阳). Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma[J]. Plasma Science and Technology, 2016, 18(2): 143-146. DOI: 10.1088/1009-0630/18/2/08 |
[3] | HAN Qing (韩卿), WANG Jing (王敬), ZHANG Lianzhu (张连珠). PIC/MCC Simulation of Radio Frequency Hollow Cathode Discharge in Nitrogen[J]. Plasma Science and Technology, 2016, 18(1): 72-78. DOI: 10.1088/1009-0630/18/1/13 |
[4] | GE Lei(葛蕾), ZHANG Yuantao(张远涛). A Simple Model for the Calculation of Plasma Impedance in Atmospheric Radio Frequency Discharges[J]. Plasma Science and Technology, 2014, 16(10): 924-929. DOI: 10.1088/1009-0630/16/10/05 |
[5] | ZHAO Guoming(赵国明), SUN Qian(孙倩), ZHAO Shuxia(赵书霞), GAO Shuxia(高书侠), ZHANG Lianzhu(张连珠). The Effect of Gas Flow Rate on Radio-Frequency Hollow Cathode Discharge Characteristics[J]. Plasma Science and Technology, 2014, 16(7): 669-676. DOI: 10.1088/1009-0630/16/7/07 |
[6] | CHI Yangyang(匙阳阳), ZHANG Yuantao(张远涛). Theoretical Study on the Characteristics of Atmospheric Radio Frequency Discharges by Altering Electrode Gap[J]. Plasma Science and Technology, 2014, 16(6): 582-587. DOI: 10.1088/1009-0630/16/6/08 |
[7] | ZHANG Zhihui(张志辉), WU Xuemei(吴雪梅), NING Zhaoyuan(宁兆元). The Effect of Inductively Coupled Discharge on Capacitively Coupled Nitrogen-Hydrogen Plasma[J]. Plasma Science and Technology, 2014, 16(4): 352-355. DOI: 10.1088/1009-0630/16/4/09 |
[8] | YOU Zuowei(尤左伟), DAI Zhongling(戴忠玲), WANG Younian(王友年). Simulation of Capacitively Coupled Dual-Frequency N 2, O 2, N 2 /O 2 Discharges: Effects of External Parameters on Plasma Characteristics[J]. Plasma Science and Technology, 2014, 16(4): 335-343. DOI: 10.1088/1009-0630/16/4/07 |
[9] | LI Xuechun (李雪春), WANG Huan (王欢), DING Zhenfeng (丁振峰), WANG Younian (王友年). Effect of Duty Cycle on the Characteristics of Pulse-Modulated Radio-Frequency Atmospheric Pressure Dielectric Barrier Discharge[J]. Plasma Science and Technology, 2012, 14(12): 1069-1072. DOI: 10.1088/1009-0630/14/12/06 |
[10] | WANG Yan(王燕), LIU Xiang-Mei(刘相梅), SONG Yuan-Hong(宋远红), WANG You-Nian(王友年). e-dimensional fluid model of pulse modulated radio-frequency SiH4/N2/O2 discharge[J]. Plasma Science and Technology, 2012, 14(2): 107-110. DOI: 10.1088/1009-0630/14/2/05 |