Citation: | ZHANG Lianzhu(张连珠), YAO Fubao(姚福宝), ZHAO Guoming(赵国明), HAO Yingying(郝莹莹), SUN Qian(孙倩). Effect of Addition of Nitrogen to a Capacitively Radio-Frequency Hydrogen Discharge[J]. Plasma Science and Technology, 2014, 16(3): 203-210. DOI: 10.1088/1009-0630/16/3/06 |
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