Growth of mirror-like ultra-nanocrystalline diamond (UNCD) films by a facile hybrid CVD approach

Shuo YANG (阳硕); Weidong MAN (满卫东); Jilei LYU (吕继磊); Xiong XIAO (肖雄); Zhiheng YOU (游志恒); Nan JIANG (江南)

doi:10.1088/2058-6272/aa57f7

Plasma Science and Technology > 2017 > 19(5): 55505-055505. > DOI: 10.1088/2058-6272/aa57f7

Shuo YANG (阳硕), Weidong MAN (满卫东), Jilei LYU (吕继磊), Xiong XIAO (肖雄), Zhiheng YOU (游志恒), Nan JIANG (江南). Growth of mirror-like ultra-nanocrystalline diamond (UNCD) films by a facile hybrid CVD approach[J]. Plasma Science and Technology, 2017, 19(5): 55505-055505. DOI: 10.1088/2058-6272/aa57f7

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Growth of mirror-like ultra-nanocrystalline diamond (UNCD) films by a facile hybrid CVD approach

1 Provincial Key Laboratory of Plasma Chemistry and Advanced Materials, Wuhan Institute of Technology, Wuhan 430073, People’s Republic of China 2 Key Laboratory of Marine New Materials and Related Technology, Zhejiang Key Laboratory of Marine Materials and Protection Technology, Ningbo Institute of Material Technology & Engineering, Chinese Academy of Sciences, Ningbo 315201, People’s Republic of China

Funds: This work was supported by the program of international S&T cooperation (Agreement No. S2015ZR1100).

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Received Date: November 10, 2016

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Abstract

Abstract

In this study, growth of mirror-like ultra-nanocrystalline diamond (UNCD) films by a facile hybrid CVD approach was presented. The nucleation and deposition of UNCD films were conducted in microwave plasma CVD (MPCVD) and direct current glow discharge CVD (DC GD CVD) on silicon substrates, respectively. A very high nucleation density (about 1×10¹¹ nuclei cm^-2) was obtained after plasma pretreatment. Furthermore, large area mirrorlike UNCD films of Φ 50 mm were synthesized by DC GD CVD. The thickness and grain size of the UNCD films are 24 μm and 7.1 nm, respectively. In addition, the deposition mechanism of the UNCD films was discussed.
- plasma pretreatment,
- microwave plasma CVD,
- direct current glow discharge CVD,
- ultra-nanocrystalline diamond films

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References (14)

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