Citation: | Peiyu JI (季佩宇), Jun YU (於俊), Tianyuan HUANG (黄天源), Chenggang JIN (金成刚), Yan YANG (杨燕), Lanjian ZHUGE (诸葛兰剑), Xuemei WU (吴雪梅). Mechanism of high growth rate for diamond-like carbon films synthesized by helicon wave plasma chemical vapor deposition[J]. Plasma Science and Technology, 2018, 20(2): 25505-025505. DOI: 10.1088/2058-6272/aa94bd |
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