Study of electron-extraction characteristics of an inductively coupled radio-frequency plasma neutralizer

Jianwu HE (贺建武); Longfei MA (马隆飞); Senwen XUE (薛森文); Chu ZHANG (章楚); Li DUAN (段俐); Qi KANG (康琦)

doi:10.1088/2058-6272/aa89e1

Plasma Science and Technology > 2018 > 20(2): 25403-025403. > DOI: 10.1088/2058-6272/aa89e1

Jianwu HE (贺建武), Longfei MA (马隆飞), Senwen XUE (薛森文), Chu ZHANG (章楚), Li DUAN (段俐), Qi KANG (康琦). Study of electron-extraction characteristics of an inductively coupled radio-frequency plasma neutralizer[J]. Plasma Science and Technology, 2018, 20(2): 25403-025403. DOI: 10.1088/2058-6272/aa89e1

Citation:

PDF (740 KB)

Study of electron-extraction characteristics of an inductively coupled radio-frequency plasma neutralizer

1 National Micro Gravity Laboratory, Institute of Mechanics, CAS, Beijing 100190, People’s Republic of China 2 School of Engineering Sciences, University of Chinese Academy of Sciences, Beijing 100049, People’s Republic of China

Funds: This work is supported by the Strategic Priority Research Program of the Chinese Academy of Sciences (Grant No. XDB23030100).

More Information

Received Date: July 12, 2017

Graphical Abstract

Abstract

Abstract

Inductively coupled radio-frequency (RF) plasma neutralizer (RPN) is an insert-free device that can be employed as an electron source in electric propulsion applications. Electron-extraction characteristics of the RPN are related to the bulk plasma parameters and the device’s geometry. Therefore, the effects of different electron-extraction apertures and operational parameters upon the electron-extraction characteristics are investigated according to the global nonambipolar flow andsheathmodel. Moreover,these models canalsobeusedtoexplain why the electron-extraction characteristics of the RPN strongly depend upon the formation of the anode spot. During the experimental study, two types of anode spots are observed. Each of them has unique characteristics of electron extraction. Moreover, the hysteresis of an anode spot is observed by changing the xenon volume-flow rates or the bias voltages. In addition, the rapid ignited method, gas-utilization factor, electron-extraction cost and other factors that need to be considered in the design of the RPN are also discussed.
- electron source,
- plasma cathode,
- RF neutralizer,
- RF plasma,
- anode spot

FullText(HTML)

References (20)

References

[1]	Scholze F, Tartz M and Neumann H 2008 Rev. Sci. Instrum. 79 02B724
[2]	Hatakeyama T et al 2007 Preliminary study on radio frequency neutralizer for ion engine 30th Int. Electric Propulsion Conf. (Florence, Italy) IEPC-2007-226
[3]	Weis S et al 2005 Development of a capacitively coupled insert-free RF-neutralizer 29th Int. Electric Propulsion Conf. (Princeton, NJ: Princeton University) IEPC-2005-086
[4]	Godyak V, Raitses Y and Fisch N J 2007 RF plasma cathode-neutralizer for space applications 30th Int. Electric Propulsion Conf. (Florence, Italy) IEPC-2007-266
[5]	To?sJ et al 2002 Contrib. Plasma Phys. 42 119
[6]	Raitses Y, Hendryx J K and Fisch N J 2009 A parametric study of electron extraction from a low frequency inductively coupled RF-plasma source 31th Int. Electric Propulsion Conf. (Michigan, MI: University of Michigan) IEPC?2009-24
[7]	Weatherford B R, Barnat E V and Foster J E 2012 Plasma Sources Sci. Technol. 21 055030
[8]	Zhao G et al 2014 Plasma Sci. Technol. 16 669
[9]	Jahanbakhsh S and Celik M 2014 Theoretical investigation and modeling of current extraction from a radio-frequency cathode 50th AIAA/ASME/SAE/ASEE Joint Propulsion Conf. (Cleveland, OH: AIAA) AIAA 2014-3402
[10]	Jahanbakhsh S, Satir M and Celik M 2016 Rev. Sci. Instrum. 87 02B922
[11]	Hidaka Y et al 2007 J. Vac. Sci. Technol. 25 781
[12]	Takao Y et al 2016 Japan. J. Appl. Phys. 55 07LD09
[13]	Longmier B, Baalrud S and Hershkowitz N 2006 Rev. Sci. Instrum. 77 513
[14]	Longmier B and Hershkowitz N 2008 Rev. Sci. Instrum. 79 093506
[15]	Baalrud S D, Longmier B and Hershkowitz N 2009 Plasma Sources Sci. Technol. 18 035002
[16]	Baalrud S D, Hershkowitz N and Longmier B 2007 Phys. Plasmas 14 169
[17]	Baalrud S D et al 2015 Plasma Physics and Controlled Fusion 57 44003
[18]	Loeb H W and Schartner K 2004 Development of RIT-Microthrusters 55th Int. Astronautical Congress (Vancouver, Canada) IAC-04-S.4.04
[19]	Song B, D’Angelo N and Merlino R L 1991 J. Phys. D Appl. Phys. 24 1789
[20]	Chabert P and Braithwaite N 2011 Physics of Radio-Frequency Plasmas (Cambridge: Cambridge University Press) http:// ftfsite.ru/wp-content/?les/Physics_of_Radi_5.1.pdf

[1]	Zeyu HAO (郝泽宇), JianSONG(宋健), YueHUA(滑跃), Gailing ZHANG (张改玲), Xiaodong BAI (白晓东), Chunsheng REN (任春生). Frequency dependence of plasma characteristics at different pressures in cylindrical inductively coupled plasma source[J]. Plasma Science and Technology, 2019, 21(7): 75401-075401. DOI: 10.1088/2058-6272/ab1035
[2]	Chundong HU (胡纯栋), Yahong XIE (谢亚红), Yongjian XU (许永建), Caichao JIANG (蒋才超), Jianglong WEI (韦江龙), Yuming GU (顾玉明), Qinglong CUI (崔庆龙), Lizhen LIANG (梁立振), Shiyong CHEN (陈世勇), Yuanlai XIE (谢远来). Achievement of 1000 s plasma generation of RF source for neutral beam injector[J]. Plasma Science and Technology, 2019, 21(2): 22001-022001. DOI: 10.1088/2058-6272/aaf1e0
[3]	Xianhai PANG (庞先海), Ting WANG (王婷), Shixin XIU (修士新), Junfei YANG (杨俊飞), Hao JING (景皓). Investigation of cathode spot characteristics in vacuum under transverse magnetic field (TMF) contacts[J]. Plasma Science and Technology, 2018, 20(8): 85502-085502. DOI: 10.1088/2058-6272/aab782
[4]	Chenfan YU (余晨帆), Xin ZHOU (周鑫), Dianzheng WANG (王殿政), Neuyen VAN LINH, Wei LIU (刘伟). Study on the RF inductively coupled plasma spheroidization of refractory W and W-Ta alloy powders[J]. Plasma Science and Technology, 2018, 20(1): 14019-014019. DOI: 10.1088/2058-6272/aa8e94
[5]	Vadym PRYSIAZHNYI, Pavel SLAVICEK, Eliska MIKMEKOVA, Milos KLIMA. Influence of Chemical Precleaning on the Plasma Treatment Efficiency of Aluminum by RF Plasma Pencil[J]. Plasma Science and Technology, 2016, 18(4): 430-437. DOI: 10.1088/1009-0630/18/4/17
[6]	LIU Zhiwei (刘智惟), BAO Weimin (包为民), LI Xiaoping (李小平), LIU Donglin (刘东林), ZHOU Hui (周辉). Influence of Plasma Pressure Fluctuation on RF Wave Propagation[J]. Plasma Science and Technology, 2016, 18(2): 131-137. DOI: 10.1088/1009-0630/18/2/06
[7]	CHEN Jiale (陈佳乐), GAO Zhe (高喆). Tokamak Plasma Flows Induced by Local RF Forces[J]. Plasma Science and Technology, 2015, 17(10): 809-816. DOI: 10.1088/1009-0630/17/10/01
[8]	A. A. AZOOZ, M. A. AHMAD. The Effect of the Earthed Electrode Size on the Ignition Voltage of Low-Pressure RF Capacitive Discharge in Argon[J]. Plasma Science and Technology, 2013, 15(9): 881-884. DOI: 10.1088/1009-0630/15/9/09
[9]	K. HANADA, H. ZUSHI, H. IDEI, K. NAKAMURA, M. ISHIGURO, S. TASHIMA, E. I. KALINNIKOVA, M. SAKAMOTO, M. HASEGAWA, A. FUJISAWA, A. HIGASHIJIMA, S. KAWASAKI, H. NAKASHIMA, H. LIU, O. MITARAI, T. MAEKAWA. Non-inductive start up of QUEST plasma by RF power[J]. Plasma Science and Technology, 2011, 13(3): 307-311.
[10]	N. U. REHMAN, F. U. KHAN, S. NASEER, G. MURTAZA, S. S. HUSSAIN, I. AHMAD, M. ZAKAULLAH. Trace-Rare-Gas Optical Emission Spectroscopy of Nitrogen Plasma Generated at a Frequency of 13.56 MHz[J]. Plasma Science and Technology, 2011, 13(2): 208-212.