Abnormal transition of the electron energy distribution with excitation of the second harmonic in low-pressure radio-frequency capacitively coupled plasmas

The self-excited second harmonic in radio-frequency capacitively coupled plasma was significantly enhanced by adjusting the external variable capacitor. At a lower pressure of 3 Pa, the excitation of the second harmonic caused an abnormal transition of the electron energy probability function, resulting in abrupt changes in the electron density and temperature. Such changes in the electron energy probability function as well as the electron density and temperature were not observed at the higher pressure of 16 Pa under similar harmonic changes. The phenomena are related to the influence of the second harmonic on stochastic heating, which is determined by both amplitude and the relative phase of the harmonics. The results suggest that the self-excited high-order harmonics must be considered in practical applications of low-pressure radio-frequency capacitively coupled plasmas.