Vibrational Temperature of Excited Nitrogen Molecules Detected in a 13.56 MHz Electrical Discharge by Sheath-Side Optical Emission Spectroscopy

Panagiotis SVARNAS

doi:10.1088/1009-0630/15/9/11

Plasma Science and Technology > 2013 > 15(9): 891-895. > DOI: 10.1088/1009-0630/15/9/11

Panagiotis SVARNAS. Vibrational Temperature of Excited Nitrogen Molecules Detected in a 13.56 MHz Electrical Discharge by Sheath-Side Optical Emission Spectroscopy[J]. Plasma Science and Technology, 2013, 15(9): 891-895. DOI: 10.1088/1009-0630/15/9/11

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Vibrational Temperature of Excited Nitrogen Molecules Detected in a 13.56 MHz Electrical Discharge by Sheath-Side Optical Emission Spectroscopy

Panagiotis SVARNAS(Panagiotis SVARNAS)

University of Patras, Department of Electrical and Computer Engineering, High Voltage Laboratory, 26504 Rion - Patras, Greece

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Received Date: July 19, 2011

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Abstract

Abstract

Optical emission spectroscopy parallel to the axis of a low-pressure radio-frequency discharge in nitrogen was realized, i. e. end-on instead of customary side-on measurements. A specially designed optical feedthrough was fabricated and installed co-planar with the anode elec- trode, allowing non-invasive observations perpendicular to the plasma sheath. The principal ex- cited species flowing towards the grounded electrode were identified and, by assuming Boltzmann distributions, the vibrational temperature of the molecules on the X ¹ Σ⁺ _g and C³ Π _u levels was estimated under various operating conditions.
- capacitively-coupled plasmas,
- radio-frequency,
- nitrogen,
- optical emission spectroscopy,
- optical feedthrough,
- vibrational temperature

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