Electron Temperature Measurement by Floating Probe Method  Using AC Voltage

Satoshi NODOMI; Shuichi SATO; Mikio OHUCHI

doi:10.1088/1009-0630/18/11/06

Plasma Science and Technology > 2016 > 18(11): 1089-1094. > DOI: 10.1088/1009-0630/18/11/06

Satoshi NODOMI, Shuichi SATO, Mikio OHUCHI. Electron Temperature Measurement by Floating Probe Method Using AC Voltage[J]. Plasma Science and Technology, 2016, 18(11): 1089-1094. DOI: 10.1088/1009-0630/18/11/06

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Electron Temperature Measurement by Floating Probe Method Using AC Voltage

Department of Electrical and Electronic Engineering, Tokyo Denki University, 5 Senju-Asahi-cho, Adachi-ku, Tokyo 120-8551, Japan

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Received Date: September 27, 2015

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Abstract

Abstract

This study presents a novel floating probe method to measure electron temperatures using a hollow cathode-type discharge tube. The proposed method detects a shift in the floating potential when an AC voltage is applied to a probe through an intermediary blocking capacitor. The shift in the floating potential is described as a function of the electron temperature and the applied AC voltage. The floating probe method is simpler than the Langmuir probe method because it does not require the measurement of volt-ampere characteristics. As the input AC voltage increases, the electron temperature converges. The electron temperature measured using the floating probe method with an applied sinusoidal voltage shows a value close to the first (tail) electron temperature in the range of the floating potential.
- electrostatic probe,
- Langmuir probe,
- floating potential,
- electron temperature,
- sheath

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References

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