Theoretical Study on the Characteristics of Atmospheric Radio Frequency Discharges by Altering Electrode Gap

CHI Yangyang(匙阳阳); ZHANG Yuantao(张远涛)

doi:10.1088/1009-0630/16/6/08

Plasma Science and Technology > 2014 > 16(6): 582-587. > DOI: 10.1088/1009-0630/16/6/08

CHI Yangyang(匙阳阳), ZHANG Yuantao(张远涛). Theoretical Study on the Characteristics of Atmospheric Radio Frequency Discharges by Altering Electrode Gap[J]. Plasma Science and Technology, 2014, 16(6): 582-587. DOI: 10.1088/1009-0630/16/6/08

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Theoretical Study on the Characteristics of Atmospheric Radio Frequency Discharges by Altering Electrode Gap

Shandong Provincial Key Lab of UHV Technology and Gas Discharge Physics, School of Electrical Engineering, Shandong University, Jinan 250061, China

Funds: supported by National Natural Science Foundation of China (No. 11375107) and the Fundamental Research Funds of Shandong University of China (No. 2012TS067)

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Received Date: March 24, 2013

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Abstract

Abstract

In this paper, we present a theoretical study on the discharge characteristics of radio-frequency discharges at atmospheric pressure driven by a higher frequency of 40.68 MHz while the electrode gap is altered. Based on the analytical equations and simulation data from a one-dimensional fluid model, an optimal gap between electrodes, at which the largest electron density is obtained, can be observed under a constant power condition; however, as the electrode gap increases the time-averaged electron temperature decreases, and the underpinning physics is also discussed based on the simulation results. This study indicates that at a constant power by choosing an appropriate electrode spacing, the rf discharge can be effectively optimized at atmospheric pressure.
- atmospheric radio frequency discharges,
- plasma simulation,
- very high frequency discharges,
- electron density

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References (27)

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