A comparison of emissive and cold floating probe techniques for electric potential measurements in rf inductive discharge

Yaroslav MURZAEV; Gennadii LIZIAKIN; Andrey GAVRIKOV; Rinat TIMIRKHANOV; Valentin SMIRNOV

doi:10.1088/2058-6272/aaf250

Plasma Science and Technology > 2019 > 21(4): 45401-045401. > DOI: 10.1088/2058-6272/aaf250

Yaroslav MURZAEV, Gennadii LIZIAKIN, Andrey GAVRIKOV, Rinat TIMIRKHANOV, Valentin SMIRNOV. A comparison of emissive and cold floating probe techniques for electric potential measurements in rf inductive discharge[J]. Plasma Science and Technology, 2019, 21(4): 45401-045401. DOI: 10.1088/2058-6272/aaf250

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A comparison of emissive and cold floating probe techniques for electric potential measurements in rf inductive discharge

Joint Institute for High Temperatures of the Russian Academy of Sciences, 125412, Izhorskaya 13, Bd 2, Moscow, Russia

Funds: This work was supported by the Russian Science Foundation (project No. 14-29-00231).

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Received Date: July 31, 2018

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Abstract

A cold floating probe method was compared with the emissive floating probe method in terms of a low-pressure radio-frequency inductive discharge. The dependences of difference between the plasma potential and the floating potential on the electron temperature 1–8 eV, plasma density 10⁹ –10¹² cm⁻³ and magnetic field 100–650 G were obtained. It was demonstrated that the difference between the potentials that obtained by these two methods can differ significantly from the expected value of 5.2 kT_e/e for argon.
- emissive probe,
- floating probe,
- rf inductive discharge,
- plasma potential measurement

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A comparison of emissive and cold floating probe techniques for electric potential measurements in rf inductive discharge