Citation: | Hongyue LI (李红月), Xingwei WU (吴兴伟), Cong LI (李聪), Yong WANG (王勇), Ding WU (吴鼎), Jiamin LIU (刘佳敏), Chunlei FENG (冯春雷), Hongbin DING (丁洪斌). Study of spatial and temporal evolution of Ar and F atoms in SF6/Ar microsecond pulsed discharge by optical emission spectroscopy[J]. Plasma Science and Technology, 2019, 21(7): 74008-074008. DOI: 10.1088/2058-6272/ab0c46 |
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