Effect of Radio-Frequency and Low-Frequency Bias Voltage on the Formation of Amorphous Carbon Films Deposited by Plasma Enhanced Chemical Vapor Deposition

Hadar MANIS-LEVY; Tsachi LIVNEH; Ido ZUKERMAN; Moshe H. MINTZ; Avi RAVEH

doi:10.1088/1009-0630/16/10/09

Plasma Science and Technology > 2014 > 16(10): 954-959. > DOI: 10.1088/1009-0630/16/10/09

Hadar MANIS-LEVY, Tsachi LIVNEH, Ido ZUKERMAN, Moshe H. MINTZ, Avi RAVEH. Effect of Radio-Frequency and Low-Frequency Bias Voltage on the Formation of Amorphous Carbon Films Deposited by Plasma Enhanced Chemical Vapor Deposition[J]. Plasma Science and Technology, 2014, 16(10): 954-959. DOI: 10.1088/1009-0630/16/10/09

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Effect of Radio-Frequency and Low-Frequency Bias Voltage on the Formation of Amorphous Carbon Films Deposited by Plasma Enhanced Chemical Vapor Deposition

1 Department of Nuclear Engineering, Ben-Gurion University of the Negev, Beer-Sheva 84105, Israel 2 NRC-Negev, Beer-Sheva 84190, Israel 3 Advanced Coatings Center, Rotem Industries Ltd., Mishor Yamin, D.N. Arava 86800, Israel

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Received Date: October 23, 2013

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Abstract

Abstract

The effect of radio-frequency (RF) or low-frequency (LF) bias voltage on the for- mation of amorphous hydrogenated carbon (a-C:H) films was studied on silicon substrates with a low methane (CH₄ ) concentration (2-10 vol.%) in CH₄ +Ar mixtures. The bias substrate was applied either by RF (13.56 MHz) or by LF (150 kHz) power supply. The highest hardness values (∼18-22 GPa) with lower hydrogen content in the films (∼20 at.%) deposited at 10 vol.% CH 4, was achieved by using the RF bias. However, the films deposited using the LF bias, under similar RF plasma generation power and CH 4 concentration (50 W and 10 vol.%, respectively), displayed lower hardness (∼6-12 GPa) with high hydrogen content (∼40 at.%). The structures analyzed by Fourier Transform Infrared (FTIR) and Raman scattering measurements provide an indication of trans-polyacetylene structure formation. However, its excessive formation in the films deposited by the LF bias method is consistent with its higher bonded hydrogen concentration and low level of hardness, as compared to the film prepared by the RF bias method. It was found that the effect of RF bias on the film structure and properties is stronger than the effect of the low-frequency (LF) bias under identical radio-frequency (RF) powered electrode and identical PECVD (plasma enhanced chemical vapor deposition) system configuration.
- amorphous carbon,
- PECVD,
- film deposition,
- FTIR,
- Raman

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References (23)

References

1 Robertson J. 2002, Material Sci. Eng. R, 37: 129

2 Jacob W, Moller W. 1993, Appl. Phys. Lett. 63: 1771

3 Calderon-Moreno J M. 2006, Diamond & Related Materials, 15: 958

4 Khriachtchev L Yu, Lappalainen R, Hakovirta M, et al. 1997, Diamond & Related Materials, 6: 694

5 Voevodin A A, Donley M S, Zabinski J S. 1997, Surf. Coat. Technol., 92: 42

6 Kahn M, Menegazzo N, Mizaikoff B, et al. 2007, Plasma Processes and Polymers, 4: S200

7 Cicala G, Bruno P and Losacco A M. 2004, Diamond & Related Materials, 13: 1361

8 Li H, Xu T, Chen J, et al. 2003. J. Phys. D: Appl. Phys., 36: 3183

9 Li J, Tian X, Gong C, et al. 2009, Rev. Sci. Instrum., 80: 123504

10 Yang L, Xin Y, Xu H, et al. 2010, Plasma Science and Technology, 12: 53

11 Chouquet C, Gerbaud G, Bardet M, et al. 2010, Surf. Coat. Technol., 204: 1339

12 Ravi N, Bukhovets V L, Varshavskayal G, et al. 2007, Diamond & Related Materials, 16: 90

13 Guo G, Tang G, Wang Y, et al. 2011, Applied Surface Science, 157: 4738

14 Basu M, Dutta J, Chaudhuri S, et al. 1996, Vacuum, 47: 233

15 Prawer S, Nugent K W, Lifshitz Y, et al. 1996, Diamond & Related Materials, 5: 433

16 Piazzaa F, Golanski A, Schulze S, et al. 2003, Appl. Phys. Lett., 82: 358

17 Beeman D, Silverman J, Lynds R, et al. 1984. Phys. Review B, 30: 870

18 Ferrari A C and Robertson J. 2001, Physical Review B, 63: 121405(R)

19 Baby A, Mahony C M O and Maguire P D. 2011, Plasma Sources Sci. Technol., 20: 015003

20 Oshiro T, Yamazato M, Higa A, et al. 2007, Jpn. J. Appl. Phys., 46: 756

21 Ager III J W, Silva S R P, and Robertson J. 1997, IEEE Trans. Magn., 33: 3148

22 Gordillo-Vazquez F J, Gomez-Alexandre C, and Albella J M. 2001, Plasma Sources Sci. Technol., 10: 99

23 Ilberg L, Manis-Levy H, Raveh A, et al. 2013, Diamond & Related Materials, 38: 79

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