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Hongyu FAN, Chunjie NIU, Xiaoping LI, Weifeng LIU, Yang ZHANG, Weiyuan NI, Yinghui ZHANG, Lu LIU, Dongping LIU, Günther BENSTETTER, Guangjiu LEI, Jinhai NIU. W fuzz layers: very high resistance to sputtering under fusion-relevant He+ irradiations[J]. Plasma Science and Technology, 2022, 24(1): 015601. DOI: 10.1088/2058-6272/ac35a2
Citation: Hongyu FAN, Chunjie NIU, Xiaoping LI, Weifeng LIU, Yang ZHANG, Weiyuan NI, Yinghui ZHANG, Lu LIU, Dongping LIU, Günther BENSTETTER, Guangjiu LEI, Jinhai NIU. W fuzz layers: very high resistance to sputtering under fusion-relevant He+ irradiations[J]. Plasma Science and Technology, 2022, 24(1): 015601. DOI: 10.1088/2058-6272/ac35a2

W fuzz layers: very high resistance to sputtering under fusion-relevant He+ irradiations

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  • Corresponding author:

    Dongping LIU, E-mail: dpliu@dlut.edu.cn

    Jinhai NIU, E-mail: niujh@dlnu.edu.cn

  • Received Date: June 06, 2021
  • Revised Date: October 31, 2021
  • Accepted Date: November 01, 2021
  • Available Online: March 18, 2024
  • Published Date: December 08, 2021
  • In this study, we have modeled the sputtering process of energetic He+ ions colliding with W nano-fuzz materials, based on the physical processes, such as the collision and diffusion of energetic particles, sputtering and redeposition. Our modeling shows that the fuzzy nanomaterials with a large surface-to-volume ratio exhibit very high resistance to sputtering under fusion-relevant He+ irradiations, and their sputtering yields are mainly determined by the thickness of fuzzy nano-materials, the reflection coefficients and mean free paths of energetic particles, surface sputtering yields of a flat base material, and the geometry of nano-fuzz. Our measurements have confirmed that the surface sputtering yield of a W nano-fuzz layer with the columnar geometry of nano-fuzz in cross-section is about one magnitude of order lower than the one of smooth W substrates. This work provides a complete model for energetic particles colliding with the nano-fuzz layer and clarifies the fundamental sputtering process occurring in the nano-fuzz layer.

  • This work is supported by the National Key R & D Program of China (No. 2017YFE0300106), National Natural Science Foundation of China (No. 11320101005), Liaoning Provincial Natural Science Foundation (Nos. 20180510006, 2019-ZD-0186), and Natural Science Basis Research Program of Shanxi Province (No. 2020GY-268).

  • [1]
    Knaster J, Moeslang A and Muroga T 2016 Nat. Phys. 12 424 doi: 10.1038/nphys3735
    [2]
    Hommelhoff P et al 2006 Phys. Rev. Lett. 96 077401 doi: 10.1103/PhysRevLett.96.077401
    [3]
    Weyer G et al 1980 Phys. Rev. Lett. 44 155 doi: 10.1103/PhysRevLett.44.155
    [4]
    Yu M L 1978 Phys. Rev. Lett. 40 574 doi: 10.1103/PhysRevLett.40.574
    [5]
    Ferroni F, Hammond K D and Wirth B D 2015 J. Nucl. Mater. 458 419 doi: 10.1016/j.jnucmat.2014.12.090
    [6]
    Sefta F et al 2013 J. Nucl. Mater. 438 S493 doi: 10.1016/j.jnucmat.2013.01.101
    [7]
    De Temmerman G, Hirai T and Pitts R A 2018 Plasma Phys. Control. Fusion 60 044018 doi: 10.1088/1361-6587/aaaf62
    [8]
    Behrisch R and Eckstein W 2007 Topics Appl. Physics vol 110 (Berlin: Springer)
    [9]
    Tanabe T 1994 J. Nucl. Fusion 5 129
    [10]
    OnoT K T and Muramoto T 2008 Springer Series in Materials Science vol 109 (Berlin: Springer)
    [11]
    Nietiadi M L and Urbassek H M 2013 Appl. Phys. Lett. 103 113108 doi: 10.1063/1.4821294
    [12]
    Kajita S et al 2009 Nucl. Fusion 49 095005 doi: 10.1088/0029-5515/49/9/095005
    [13]
    Baldwin M J and Doerner R P 2010 J. Nucl. Mater. 404 165 doi: 10.1016/j.jnucmat.2010.06.034
    [14]
    Fiflis P, Connolly N and Ruzic D N 2016 J. Nucl. Mater. 482 201 doi: 10.1016/j.jnucmat.2016.10.015
    [15]
    Wright G M et al 2013 J. Nucl. Mater. 438 S84 doi: 10.1016/j.jnucmat.2013.01.013
    [16]
    Wang K et al 2017 Sci. Rep. 7 42315 doi: 10.1038/srep42315
    [17]
    Valles G et al 2017 J. Nucl. Mater. 490 108 doi: 10.1016/j.jnucmat.2017.04.021
    [18]
    Bi Z H et al 2019 Nucl. Fusion 59 086025 doi: 10.1088/1741-4326/ab2472
    [19]
    Fan H Y et al 2020 Nucl. Fusion 60 046011 doi: 10.1088/1741-4326/ab71bb
    [20]
    Nishijima D et al 2011 J. Nucl. Mater. 415 S96 doi: 10.1016/j.jnucmat.2010.12.017
    [21]
    Arredondo R et al 2020 Nucl. Mater. Energy 23 100749 doi: 10.1016/j.nme.2020.100749
    [22]
    Eksaeva A et al 2021 Nucl. Mater. Energy 27 100987 doi: 10.1016/j.nme.2021.100987
    [23]
    Brezinsek S et al 2019 Nucl. Fusion 59 096035 doi: 10.1088/1741-4326/ab2aef
    [24]
    Ni W Y et al 2020 J. Nucl. Mater. 536 152229 doi: 10.1016/j.jnucmat.2020.152229
    [25]
    Liu L et al 2016 J. Nucl. Mater. 471 1 doi: 10.1016/j.jnucmat.2016.01.001
    [26]
    Eckstein W and Preuss R 2003 J. Nucl. Mater. 320 209 doi: 10.1016/S0022-3115(03)00192-2
    [27]
    Ni W Y et al 2019 J. Nucl. Mater. 527 151800 doi: 10.1016/j.jnucmat.2019.151800
    [28]
    Ni W Y et al 2020 Vacuum 173 109146 doi: 10.1016/j.vacuum.2019.109146
    [29]
    Was G S 2007 Fundamentals of Radiation Materials Science: Metals and Alloys (Berlin: Springer)
    [30]
    Ziegler J F and Biersack J P 1985 The stopping and range of ions in matter ed D A Bromley Treatise on Heavy-Ion Science (Boston, MA: Springer) p 93
    [31]
    Roth J, Bohdansky J and Ottenberger W 1979 Data on low energy light ion sputtering garching: max-planck-institut für plasmaphysik report IPP 9/26
    [32]
    Eckstein W et al 1993 Sputtering data garching: max-planckinstitut füur plasmaphysik report IPP 9/82
    [33]
    Rosenberg D and Wehner G K 1962 J. Appl. Phys. 33 1842 doi: 10.1063/1.1728843
    [34]
    Woller K B, Whyte D G and Wright G M 2017 Nucl. Fusion 57 066005 doi: 10.1088/1741-4326/aa67ac
    [35]
    Hwangbo D et al 2018 Nucl. Fusion 58 096022 doi: 10.1088/1741-4326/aacd1f
    [36]
    Hwangbo D et al 2019 Nucl. Mater. Energy 18 250 doi: 10.1016/j.nme.2019.01.008
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