The mechanism study of low-pressure air plasma cleaning on large-aperture optical surface unraveled by experiment and reactive molecular dynamics simulation

Yuhai LI; Qingshun BAI; Yuheng GUAN; Hao LIU; Peng ZHANG; Buerlike BATELIBIEKE; Rongqi SHEN; Lihua LU; Xiaodong YUAN; Xinxiang MIAO; Wei HAN; Caizhen YAO

doi:10.1088/2058-6272/ac69b6

Plasma Science and Technology > 2022 > 24(6): 064012. > DOI: 10.1088/2058-6272/ac69b6

Yuhai LI, Qingshun BAI, Yuheng GUAN, Hao LIU, Peng ZHANG, Buerlike BATELIBIEKE, Rongqi SHEN, Lihua LU, Xiaodong YUAN, Xinxiang MIAO, Wei HAN, Caizhen YAO. The mechanism study of low-pressure air plasma cleaning on large-aperture optical surface unraveled by experiment and reactive molecular dynamics simulation[J]. Plasma Science and Technology, 2022, 24(6): 064012. DOI: 10.1088/2058-6272/ac69b6

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The mechanism study of low-pressure air plasma cleaning on large-aperture optical surface unraveled by experiment and reactive molecular dynamics simulation

1.
School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150000, People's Republic of China
2.
Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, People's Republic of China
3.
Chongqing Research Institute, Harbin Institute of Technology, Chongqing 401135, People's Republic of China

More Information

Corresponding author:
Qingshun BAI, E-mail: qshbai@hit.edu.cn

Peng ZHANG, E-mail: zp@hit.edu.cn

Xiaodong YUAN, E-mail: xdyuan@caep.cn
Received Date: October 12, 2021
Revised Date: April 19, 2022
Accepted Date: April 20, 2022
Available Online: December 12, 2023
Published Date: June 13, 2022

Graphical Abstract

Abstract

Abstract

Low-pressure air plasma cleaning is an effective method for removing organic contaminants on large-aperture optical components in situ in the inertial confinement fusion facility. Chemical reactions play a significant role in plasma cleaning, which is a complex process involving abundant bond cleavage and species generation. In this work, experiments and reactive molecular dynamics simulations were carried out to unravel the reaction mechanism between the benchmark organic contaminants of dibutyl phthalate and air plasma. The optical emission spectroscopy was used to study the overall evolution behaviors of excited molecular species and radical signals from air plasma as a reference to simulations. Detailed reaction pathways were revealed and characterized, and specific intermediate radicals and products were analyzed during experiments and simulation. The reactive species in the air plasma, such as O, HO₂ and O₃ radicals, played a crucial role in cleaving organic molecular structures. Together, our findings provide an atomic-level understanding of complex reaction processes of low-pressure air plasma cleaning mechanisms and are essential for its application in industrial plasma cleaning.
- organic contaminants,
- large-aperture optical components,
- low-pressure air plasma,
- plasma cleaning,
- reactive species,
- reactive molecular dynamics

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Acknowledgments

This work was supported by the Joint Funds of National Natural Science Foundation of China and China Academy of Engineering Physics (NSAF) (No. U2030109) and National Natural Science Foundation of China (No. 52075129).

References (39)

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