Continuous Emission Spectrum Measurement for Electron Temperature Determination in Low-Temperature Collisional Plasmas

LIU Qiuyan; LI Hong; CHEN Zhipeng; XIE Jinlin; LIU Wandong

Plasma Science and Technology > 2011 > 13(4): 451-457.

LIU Qiuyan, LI Hong, CHEN Zhipeng, XIE Jinlin, LIU Wandong. Continuous Emission Spectrum Measurement for Electron Temperature Determination in Low-Temperature Collisional Plasmas[J]. Plasma Science and Technology, 2011, 13(4): 451-457.

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Continuous Emission Spectrum Measurement for Electron Temperature Determination in Low-Temperature Collisional Plasmas

CAS Key Laboratory of Basic Plasma Physics, Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China

Funds: supported by National Natural Science Foundation of China(Nos.10675121,10705028 and 10605025) and National Basic Research Program of China(No.2008CB717800)

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Abstract

Abstract

Continuous emission spectrum measurement is applied for the inconvenient diagnostics of low-temperature collisional plasmas. According to the physical mechanism of continuous emission, a simplified model is presented to analyze the spectrum in low temperature plasma. The validity of this model is discussed in a wide range of discharge parameters, including electron temperature and ionization degree. Through the simplified model, the continuous emission spectrum in a collisional argon internal inductively coupled plasma is experimentally measured to determine the electron temperature distribution for different gas pressures and radio-frequency powers. The inverse Abel transform is also applied for a better spatially resoluted results. Meanwhile, the result of the continuous emission spectrum measurement is compared to that of the electrostatic double probes, which indicates the effectiveness of this method.
- continuous emission spectrum,
- diagnostics,
- low-temperature plasma,
- collisional plasma

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