Experimental Investigation of Surface Wave Plasma Excited by a Cylindrical Dielectric Rod

WU Zhonghang(吴忠航); LI Zebin(李泽斌); JU Jiaqi(居家奇); HE Kongduo(何孔多); YANG Xilu(杨曦露); YAN Hang(颜航); CHEN Zhenliu(陈枕流); OU Qiongrong(区琼荣); LIANG Rongqing(梁荣庆)

doi:10.1088/1009-0630/16/2/06

Plasma Science and Technology > 2014 > 16(2): 118-122. > DOI: 10.1088/1009-0630/16/2/06

WU Zhonghang(吴忠航), LI Zebin(李泽斌), JU Jiaqi(居家奇), HE Kongduo(何孔多), YANG Xilu(杨曦露), YAN Hang(颜航), CHEN Zhenliu(陈枕流), OU Qiongrong(区琼荣), LIANG Rongqing(梁荣庆). Experimental Investigation of Surface Wave Plasma Excited by a Cylindrical Dielectric Rod[J]. Plasma Science and Technology, 2014, 16(2): 118-122. DOI: 10.1088/1009-0630/16/2/06

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Experimental Investigation of Surface Wave Plasma Excited by a Cylindrical Dielectric Rod

1 Department of Light Sources and Illuminating Engineering, Institute for Electric Light Sources, Fudan University, Shanghai 200433, China 2 Engineering Research Centre of Advanced Lighting Technology, Ministry of Education, Shanghai 200433, China

Funds: supported by National Natural Science Foundation of China (Nos.11005021, 51177017 and 11175049), the Fudan University Excellent Doctoral Research Program (985 Project) and the Ph.D Programs Foundation of Ministry of Education of China (No.20120071110031)

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Received Date: August 27, 2013

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Abstract

Abstract

An improved surface wave plasma source equipped with a cylindrical quartz rod has been developed, which has great potential in processing inner wall of cylindrical workpieces. A cylindrical quartz rod not only excites the plasma around the rod, but also guides surface wave plasma along the rod. The distributions of plasma density and plasma temperature under different incident microwave powers and pressures are diagnosed by a Langmuir probe. The electron density near the rod is around the order of 10 11 cm⁻³ . When the incident power is 450 W, the length of surface wave plasma column can reach up to 420 mm at 20 Pa.
- surface wave plasma,
- dielectric rod,
- electron density,
- electron temperature

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References (19)

References

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