Comparison of pulse-modulated and continuous operation modes of a radio-frequency inductive ion source

Ilya ZADIRIEV; Elena KRALKINA; Konstantin VAVILIN; Alexander NIKONOV; Georgy SHVIDKIY

doi:10.1088/2058-6272/ac8fca

Plasma Science and Technology > 2023 > 25(2): 025405. > DOI: 10.1088/2058-6272/ac8fca

Ilya ZADIRIEV, Elena KRALKINA, Konstantin VAVILIN, Alexander NIKONOV, Georgy SHVIDKIY. Comparison of pulse-modulated and continuous operation modes of a radio-frequency inductive ion source[J]. Plasma Science and Technology, 2023, 25(2): 025405. DOI: 10.1088/2058-6272/ac8fca

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Comparison of pulse-modulated and continuous operation modes of a radio-frequency inductive ion source

Physical Electronics Department, Faculty of Physics, Lomonosov Moscow State University, Moscow 119991, Russia

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Corresponding author:
Ilya ZADIRIEV, E-mail: iizadiriev@yandex.ru
Received Date: May 27, 2022
Revised Date: August 28, 2022
Accepted Date: September 05, 2022
Available Online: December 05, 2023
Published Date: January 05, 2023

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Abstract

Abstract

The paper describes an experimental study of the characteristics of a pulse-modulated radio-frequency (RF) discharge sustained at low pressures, typical of the operating modes of RF gridded ion sources. The motivation for the study is the question of whether the RF pulse-modulated mode can increase the efficiency of the ion source. The ion current values extracted from an RF inductive ion source operating in continuous and pulse-modulated modes were compared. The experimental data were also compared with the parameter calculations based on a 0D numerical model of the discharge. The measurements showed that the pulse-modulated operation mode of the RF ion source had a noticeable advantage when the power of the RF generator was 140 W or lower. However, as the generator power increased, the advantage was lost because the pulse-modulated operation mode, having a higher RF power instant value, entered the region of existence sooner than the continuous mode, where the ion production cost begins to grow with RF power.
- discharge,
- plasma,
- radio frequency (RF),
- pulse,
- electrons,
- ions

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Acknowledgments

This work was supported by the Russian Science Foundation (No. 21-72-10090), https://rscf.ru/en/project/21-72-10090/.

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